Re-Configurations

ASTC is experienced in delivering complete system refurbishment for all AMAT Endura ® 5500, Centura® 5200, and P5000 platforms.

We also offer retrofits, upgrades, field engineering support, spare parts, and maintenance contracts tailored to fit your budget .

PE4450 for sputtering and etching reflect an advanced design concept based on a high capacity load lock that permits wafer loading without breaking vacuum in the process chamber.

SEMITOOL™
Spin Rinse Dryers
Features:

Brushless Motor
Labyrinth Seal
Rotor - Quick Disconnect
Controller - 102 or 101

Custom Rotors:

We provide standard & custom Rotors to your specifications (1" - 12")

Ultralstation 3B
We offer pre-owned fully refurbished systems and product support Semi-Automatic Wafer Inspection System

150mm Tool List

LAM RESERCH 4520XL METAL ETCH 4520 XLEN
AMAT P5000 Mark II METAL ETCH
AMAT P5000 CVD
TEL ACT 8 PB1-U125-01-T TRACK
TEL CLEAN TRACK MK-VZ
TEL CLEAN TRACK MARK 8
DNS SCW-629-BV TRACK
SVG/PERKIN ELMER 641 HT MASK
SVG/PERKIN ELMER 661 HT MASK
CANON FPA-2500I3 iLine
FSI MERCURY MP CLEAN
VERTEQ ST600-42TL CLEAN
SEMITOOL sstc421270 SOLVENT/SPRAY
SEMITOOL 270-S DUAL STACK SRD
VERTEQ VCS-PDC-AIS CLEAN
VERTEQ VCS-PDC-SAH CLEAN
UNIVERSAL SYSTEMS US96RVLF1688-1 PROCESS
UNIVERSAL SYSTEMS US96RVLF1688-2 PROCESS
ADE ULTRASCAN 9350 DEFTECT
BIO-RAD QS-500 MEASUREMENT
KLA / TENCOR 6420 MEASUREMENT
KLA / TENCOR 6220 MEASUREMENT
KLA / TENCOR 7700 MEASUREMENT
KLA / TENCOR P-22 MEASUREMENT
KLA / TENCOR RS-35 MEASUREMENT
PROMETRIX OMNIMAP MEASUREMENT
KLA / TENCOR AIT DEFECT 8010/AIT
ULTRAPOINTE LIS-1010 DEFECT
KLA / TENCOR UV1280SE DEFECT
KLA / TENCOR UV1250SE DEFECT
KLA / TENCOR QUANTOX 64100 DEFECT
HITACHI S-9360 DEFECT
BTU BDF 4B FURNACE 7351C
MRL C430 FURNACE
MRL 1134 FURNACE
MRL 1030 FURNACE
HITACHI S-4500 SEM
HITACHI S-6200 H SEM
NIKON MICROSCOPE SMZ 1500
NIKON MICROSCOPE SMZ 1500 W NI-150 ILLUM

File coming soon.