OEM Parts

1064788.1 Verteq SRD Door Seal
4117060 Verteq Heat Transformer
12020-509 Semitool Stage Teflon
103113-003 3-Way Valve - 1/4"
A95-045-01 Gasonic Magnetron Tube
3011005 Yag Rod Assembly
3011203 Krypton Lamp
PW2214/20 XRD Glass X-ray Tube 60kv 2000W
04-709847-01 Quantum Bearing Seal Assy
0020-03589 Vespal Clamp Ring
3880-01182 Washer
0020-34118 Clamp Ring
0992-70275 Fine Grid
796-008091-001 Pneumatic Angle Valve
716-011573-001 Lam Research Plunger, 1/4 Turn
715-042721-885 Chamber Liner PTK3
715-045710-829 Liner Door PTK5
715-045710-828 Liner Door PTK
080921 Fusion 150PC Magnetron
26-82269-00 MEC81105-201L Inner Overlay Ring
26-82267-00 MEC81105-202L inner overlay
26-82268-00 MEC81105-200L 5" overlay Shield
26-81433-00 MEC81105-204L Cap Strap Shield
0020-01179 MEC81105-209L Overlay Support
26-82258-00 MEC81105-210L Clip/Spring
MEC83306-1014L Focus Ring Top and Middle 150mm
3500069 Oring
BG0-7359-000 6" Large Fly's Eye Lens Unit
4110092156010 OEM: Plasma-Therm, Base Ring SS.10.0-IN Clamp
1215010 Encoder Modified Direct Drive
0010-59796 300mm Heater Repair & refurbish service

Files coming soon.