SPARE PARTS FOR NOVELLUS EQUIPMENT

05-00024-00 PM Kit, Heater Conn DualRF
15-00043-02 Standoff, Gash
15-00229-00 Nut, Feedthru 1/2-20
15-00309-00 Bolt , Showerhead
15-00311-00 Nut, Cap
15-00341-00 Screw, 1/4-20
15-00371-00 Nut, Heater
15-00371-00 Nut, Heater Strap
15-00372-00 Washer, Heater
15-00385-00 Nut, Ni
15-00386-00 Washer, Nut
15-00396-00 Spindle, Flange(anodized)
15-00399-02 Screw, Hex Ni
15-00399-03 Screw, (.55 long) Ni200
15-00399-04 Screw, (1.02" long) Ni200
15-00399-05 Screw, (1.12" long) Ni200
15-00409-00 Window, Pyrex
15-00457-00 Screw, Heater strap
15-00475-00 Feedthru, ceramic
15-00483-00 Ring, Ceramic
15-00484-00 Bushing, Ceramic
15-00553-018 Shim
15-00553-05 Shim
15-00553-10 Shim
15-00553-25 Shim
15-00553-31 Shim
15-00554-05 Shim
15-00554-10 Shim
15-00554-18 Shim
15-00554-25 Shim
15-00558-01 Sleeve, Heater
15-00558-02 Ceramic, Heater
15-00567-00 Tube, Ceramic, T/C
15-00578-00 Sleeve, Flange
15-00653-00 Clamp, HSG
15-00654-00 Clamp, Flange
15-00680-00 Sleeve, TC Ceramic
15-00685-00 Feedthru, Al
15-00686-00 Washer, Feedthru,Al
15-00698-00 Screw, Fork
15-00699-01 Finger, Flat Ceramic
15-00699-02 Finger, Fork ceramic
15-00701-00 Spindle, Bottom
15-00703-00 Spindle, Top
15-00721-00 Washer, Ni #8
15-00729-00 Washer , Flange
15-00935-00 Screw, RF Ceramic
15-00951-00 Cup, Screw Cover
15-024881-00 Fork, End Cap
15-032016-00 Pin, Vented
15-032631-00 Spindle, Flange (anodized)
15-034333-00 Tube, Process
15-053394-01 Finger, w/Nibs Ceramic
15-053394-02 Finger, w/Nibs Ceramic
15-107698-00 Ceramic, Feedthru
15-108174-00 Cap, RF, Strap
15-108307-00 Bracket, RF Strap
15-114331-00 Screw, 1/4-20 (.50)
15-119059-00 Screw, 1/-20 (.25)
16-00092-00 Feedthru, Heater
16-00098-00 Insulated , Heater
16-033931-00 Showerhead, 200 mm
16-033932-00 Showerhead
17-00094-00 Strap, RF
17-103987-00 Strap, RF
20-00212-00 Nut, 8-32, Al
20-00221-00 Washer, Al
20-00222-00 Washer, Al
27-00010-00 T/C, "J" Rigid
27-00127-00 T/C
02-109622-00 3 POSITION Actuator (Bare actuator only, no Novellus integration)

----------------------------------------Special Designs--------------------------------

Bottom Plate, 200 mm
Top set, 200 mm (6pcs)
Special T-Slot Fork, 200 mm
Bottom Plate, 150 mm
Top Set, 150 mm (8 pcs)
Special T-Slot Fork, 150 mm

Tel: 909-923-2665/909-923-2666 Email: sales@asemicorp.com

SPARE PARTS PICTURE FOR NOVELLUS EQUIPMENT (pdf)Download

SPARE PARTS FOR NOVELLUS EQUIPMENT

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